This paper proposes a new measurement method based on a single probe scanning to measure the roundness error of the artifact. The presented method simplifies the mathematical processing. There is no need for complex forward and inverse Fourier transforms. The probe is installed on a micro-stage platform, and a voice coil motor drives the micro-stage platform. In this paper, a precise mathematical model of the proposed measurement method is carried out and a detailed introduction process. Computer simulation analysis proves the feasibility and repeatability of the method. The related factors affecting the accuracy of the measurement system are analyzed, and the corresponding suppression methods are proposed. Finally, a comparative experiment verifies that this method dramatically improves the measurement accuracy compared to direct measurement.

本文提出了一种基于单探针扫描的新测量方法来测量工件的圆度误差。所提出的方法简化了数学处理。不需要复杂的正向和逆傅立叶变换。探头安装在微型载物台上，由音圈电机驱动微型载物台。在本文中，对所提出的测量方法进行了精确的数学模型和详细的介绍过程。计算机仿真分析证明了该方法的可行性和可重复性。分析了影响测量系统精度的相关因素，提出了相应的抑制方法。最后，通过对比实验验证，与直接测量相比，该方法显着提高了测量精度。