A novel method to realize single-transverse-mode emission by incorporating a built-in index guide is employed on vertical-cavity surface-emitting lasers (VCSELs) with a large oxide aperture. The etched index guide provides modal loss discrimination for mode selection and transverse optical field confinement for light propagating in the longitudinal direction. A single-transverse-mode VCSEL with side-mode suppression ratio >30 dB under the full range of bias currents is achieved. The thermal resistance of the device is lower than one half of the counterpart of the conventional GaAs-based single-mode VCSELs. Moreover, compared with an ordinary VCSEL with the same oxide aperture diameter, the beam quality of the device incorporated a built-in index guide has been significantly improved. The divergence angle of the output beam estimated from the full-width-half-maximum of the far-field pattern is as small as 9°.

在具有大氧化物孔径的垂直腔面发射激光器 (VCSEL) 上采用了一种通过结合内置折射率引导实现单横模发射的新方法。蚀刻折射率导向器为模式选择提供模式损耗鉴别，并为在纵向方向传播的光提供横向光场限制。实现了在整个偏置电流范围内边模抑制比> 30 dB的单横模VCSEL。该器件的热阻比传统的基于 GaAs 的单模 VCSEL 的热阻低一半。此外，与具有相同氧化物孔径的普通VCSEL相比，内置折射率导向装置的光束质量得到了显着提高。