This article presents a single-crystal piezoelectric energy harvester (PEH) with a trapezoidal hollow hole that can obtain high energy density at low frequency. Harvesters with a hollow structure were fabricated through a series of manufacturing processes such as thermocompression bonding, screen printing and laser cutting. Finite element analysis (FEA) and experimental results showed that using low modulus brass instead of stainless steel as the PEH substrate enhances the voltage output of the device, and the hollow design greatly increases the overall stress level and power density. In addition, the developed PEH with a trapezoidal hole obtained the best output performance; when the acceleration, resonance frequency and matched load resistance were 0.5 g, 56.3 Hz and 114 kΩ, respectively, the peak voltage was 17 V and the power density was 2.52 mW/cm³. Meanwhile, compared with the unhollowed device, the peak voltage and maximum power density of the proposed PEH were increased by 30.7% and 24.4%, respectively, and the resonance frequency was reduced by 7%. This study verified the feasibility of the optimized design through simulation and experimental comparison.

中文翻译：

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空心结构压电悬臂梁能量收集器的设计、制造与试验

本文介绍了一种具有梯形空心孔的单晶压电能量收集器 (PEH)，可在低频下获得高能量密度。中空结构的收割机是通过热压粘合、丝网印刷和激光切割等一系列制造工艺制成的。有限元分析（FEA）和实验结果表明，使用低模量黄铜代替不锈钢作为 PEH 衬底提高了器件的电压输出，中空设计大大提高了整体应力水平和功率密度。此外，开发的梯形孔PEH获得了最佳的输出性能；当加速度、谐振频率和匹配负载电阻分别为0.5 g、56.3 Hz和114 kΩ时，峰值电压为17 V，功率密度为2。³ . 同时，与非空心器件相比，所提出的PEH的峰值电压和最大功率密度分别提高了30.7%和24.4%，谐振频率降低了7%。本研究通过仿真和实验对比验证了优化设计的可行性。