Most porous silicon-based interferometric sensors targeting biosensing applications consist of vertical porous silicon layers created into a silicon wafer by electrochemical anodization and operate in a flow-over configuration. In this work, we present an alternative porous silicon interferometer based on porous silicon with horizontally oriented pores. This architecture permits the integration of flow-through porous silicon membranes within planar microfluidics. Fourier-transform infrared spectroscopy was used to obtain interference spectra from fabricated lateral porous silicon membranes and red shifts were observed upon filling microfluidic chips integrating the porous membranes with solvents of higher optical indices. This work proves that lateral porous silicon membranes are typical Fabry-Pérot interferometers with a sensitivity of more than 150 nm/RIU and a limit of detection less than 10⁻³ RIU, that is comparable to vertical porous silicon layers. Moreover, we have conducted simulation studies showing that the addition of Bragg mirrors on the membranes results in spectra with narrower fringes and lateral porous silicon interferometers with improved performances. After appropriate biofunctionalization of the porous silicon surface, lateral porous silicon membrane interferometers should offer alternative solutions for the development of porous silicon flow-through biosensors monolithically integrated on-chip.

大多数针对生物传感应用的基于多孔硅的干涉传感器由通过电化学阳极氧化在硅晶片中创建的垂直多孔硅层组成，并以溢流配置运行。在这项工作中，我们提出了一种基于具有水平取向孔的多孔硅的替代多孔硅干涉仪。这种结构允许在平面微流体中集成流通多孔硅膜。傅里叶变换红外光谱用于从制造的横向多孔硅膜获得干涉光谱，在填充微流体芯片时观察到红移，将多孔膜与更高光学指数的溶剂结合在一起。^-3 RIU，与垂直多孔硅层相当。此外，我们进行了模拟研究，表明在膜上添加布拉格反射镜会产生具有更窄条纹的光谱和具有改进性能的横向多孔硅干涉仪。在对多孔硅表面进行适当的生物功能化后，横向多孔硅膜干涉仪应为开发单片集成在芯片上的多孔硅流通生物传感器提供替代解决方案。