Characteristics, such as large measurement range, good repeatability and stability, are the guarantee for a wide application of flexible three-dimensional force sensors in robots and other smart devices. In this research, a flexible three-dimensional force sensor is presented, whose structure includes force-sensitive cells, fixed under the bump and a support layer, filled around the force-sensitive cells. This setup allows the sensor to quickly recover, after the force is released, to ensure its excellent performance. The production method is very simple and has the advantage of large-scale and low-cost manufacturing. The sensor exhibited good repeatability and stability, after 25 000 cycles of loading and releasing, under 8 N force. Meanwhile, it has a large measuring range, which is 0–15 N in the direction of normal force and 0–5.5 N in the direction of shear force. The sensitivity of the sensor in the x, y, and z directions is 1.5321 V⁻¹ N⁻¹, 1.501 29 V⁻¹ N⁻¹, and 0.936 87 V⁻¹ N⁻¹, respectively. The load response time of the sensor is 33 ms and the unload recovery time of 18 ms. Regarding practical applications, the sensor shows good prospects. For example, the sensor and its array can be installed on the manipulator to sense the magnitude and location of the three-dimensional force; in the case of the flexible smart keyboard, the presented sensor array can save space significantly and recognize multiple specific input features, in order to enhance information security; while as a car controller, it is multi-functional integrated and portable, thus showing great potential as replacement to the traditional operating methods.

测量范围大、重复性和稳定性好等特点是柔性三维力传感器在机器人等智能设备中广泛应用的保证。在这项研究中，提出了一种灵活的三维力传感器，其结构包括固定在凸块下方的力敏单元和填充在力敏单元周围的支撑层。这种设置允许传感器在力释放后快速恢复，以确保其出色的性能。该生产方法非常简单，具有规模化、低成本制造的优点。在 8 N 力下，经过 25 000 次加载和释放循环后，该传感器表现出良好的重复性和稳定性。同时，它具有较大的测量范围，法向力方向为0-15 N，法向力为0-5。5 N 在剪切力方向。传感器的灵敏度x、y和z方向为1.5321 V ^-1 N ^-1、1.501 29 V ^-1 N ^-1和0.936 87 V ^-1 N ^-1， 分别。传感器的负载响应时间为 33 ms，卸载恢复时间为 18 ms。在实际应用方面，该传感器显示出良好的前景。例如，传感器及其阵列可以安装在机械手上，以感知三维力的大小和位置；在灵活的智能键盘的情况下，所呈现的传感器阵列可以显着节省空间并识别多个特定的输入特征，以增强信息安全；而作为汽车控制器，它具有多功能一体性和便携性，具有替代传统操作方式的巨大潜力。