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Flexible and high sensitive capacitive pressure sensor with microstructured electrode inspired by ginkgo leaf
Journal of Physics D: Applied Physics ( IF 3.1 ) Pub Date : 2021-08-27 , DOI: 10.1088/1361-6463/ac1ddc
Peng Zhang , Jian Zhang , Yuxia Li , Liangsong Huang

A reasonable design of flexible pressure sensors is one of the necessary conditions for improving the sensing performance and meeting the demands of various application fields, including intelligent robot, human–machine interface and health monitoring. Herein, the template method is adopted to replicate the unique natural surface microstructure of ginkgo leaf based on the concept of bionics, and a microstructured copper/polydimethylsiloxane electrode is fabricated by the magnetron sputtering method. In addition, a porous carbon black/thermoplastic polyurethane film is used as the intermediate layer to reduce the hysteresis of the sensor. The capacitive pressure sensor exhibits a high sensitivity (1.194 kPa−1, <1 kPa), wide pressure detection range (0–300 kPa), fast response time (80 ms), low hysteresis (maximum to 6.58%), ultra-low detection limit (6.53 Pa), and high stability. Further, we demonstrate the practical applications of the sensor in human joint motion and pulse signal detection, walking state detection, and providing tactile feedback during grasping with hand prosthesis. The experimental results indicate that the proposed capacitive pressure sensor can be potentially applied in the fields of electronic skin, wearable devices, and smart prostheses.



中文翻译:

具有受银杏叶启发的微结构电极的柔性高灵敏度电容式压力传感器

合理设计柔性压力传感器是提高传感性能和满足智能机器人、人机界面和健康监测等各种应用领域需求的必要条件之一。在此,基于仿生学的概念,采用模板法复制了银杏叶独特的天然表面微结构,并通过磁控溅射法制备了微结构铜/聚二甲基硅氧烷电极。此外,多孔炭黑/热塑性聚氨酯薄膜用作中间层以减少传感器的滞后。电容式压力传感器具有高灵敏度 (1.194 kPa -1, <1 kPa)、压力检测范围宽(0-300 kPa)、响应时间快(80 ms)、滞后低(最大6.58%)、超低检测限(6.53 Pa)、稳定性高。此外,我们展示了传感器在人体关节运动和脉冲信号检测、行走状态检测以及在用假手抓握过程中提供触觉反馈方面的实际应用。实验结果表明,所提出的电容式压力传感器有潜力应用于电子皮肤、可穿戴设备和智能假肢等领域。

更新日期:2021-08-27
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