Cryogenic ultra-stable Fabry–Perot cavity is one of the most promising reference cavities for laser stabilization. Here we investigate the thermal property of a hydroxide catalysis bonded silicon–sapphire hybrid cavity for 1064nm laser stabilization. The zero-thermal expansion temperature is measured to be 15.0 0.1 K, with a slope calculated to be 3 10⁻¹⁰K⁻². A simulation model with a few micrometer thick silicon oxidation layer reproduces well the experimental results. The investigations on the thermal property of the hydroxide catalysis bonded components are important for the noise evaluation and optimization. This work would be valuable for the advanced cryogenic optics, and would be interested for researchers working on cryogenic ultra-stable lasers and cryogenic gravitational wave detectors.

低温超稳定法布里-珀罗腔是最有前途的激光稳定参考腔之一。在这里，我们研究了用于 1064nm 激光稳定的氢氧化物催化键合硅-蓝宝石混合腔的热性能。测得的零热膨胀温度为 15.0 0.1 K，斜率计算为 3 10 ^-10 K ^-2. 具有几微米厚硅氧化层的仿真模型很好地再现了实验结果。氢氧化物催化键合组分的热性能研究对于噪声评估和优化非常重要。这项工作对先进的低温光学具有重要意义，并且会对从事低温超稳定激光器和低温引力波探测器的研究人员感兴趣。