Tunable ferroelectric capacitors, which exhibit a decrease in the dielectric permittivity under an electric field, are widely used in electronics for RF tunable applications. Current devices use barium strontium titanate (BST) as the tunable dielectric, but new applications call for tunable materials with specific performance improvements. It is then of crucial importance to dispose of a large panel of electrically characterized materials to identify the most suited compound for a given set of device specifications. Here, we report on the dielectric tuning properties of Ba_1−xCa_xTi_1−yZr_yO₃ (BCTZ) thin films libraries (0 ≤ x ≤ 30% and 0 ≤ y ≤ 28.5%) synthesized by combinatorial pulsed laser deposition (CPLD). An original CPLD approach allowing reliable and statistical ternary phase diagrams exploration is reported. The effects of Ca and Zr content on tunability, breakdown voltage and dielectric losses are explicated and shown to be beneficial up to a certain amount. Compounds close to (Ba_0.84Ca_0.16)(Ti_0.8Zr_0.2)O₃ exhibit the highest figures of merit, while a zone with compositions around (Ba_0.91Ca_0.09)(Ti_0.81Zr_0.19)O₃ show the best compromise between tuning ratio and figure of merit. These results highlight the potential of BCTZ thin films for electrically tunable applications.

中文翻译：

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使用精细组合薄膜方法对 BaTiO3-CaTiO3-BaZrO3 相图中的可调性进行研究

可调谐铁电电容器在电场作用下介电常数降低，广泛用于射频可调谐应用的电子产品中。当前的设备使用钛酸锶钡 (BST) 作为可调电介质，但新的应用需要具有特定性能改进的可调材料。因此，处理大量电气特征材料以确定最适合给定设备规格集的化合物至关重要。在这里，我们报告了 Ba _1-x Ca _x Ti _1-y Zr _y O ₃的介电调谐特性(BCTZ) 通过组合脉冲激光沉积 (CPLD) 合成的薄膜库 (0 ≤ x ≤ 30% 和 0 ≤ y ≤ 28.5%)。报告了允许可靠和统计三元相图探索的原始 CPLD 方法。Ca 和 Zr 含量对可调性、击穿电压和介电损耗的影响得到了解释，并表明在一定程度上是有益的。接近 (Ba _0.84 Ca _0.16 )(Ti _0.8 Zr _0.2 )O _{3 的}化合物表现出最高的品质因数，而成分在 (Ba _0.91 Ca _0.09 )(Ti _0.81 Zr _0.19 )O _{3 附近的区域}显示调谐比和品质因数之间的最佳折衷。这些结果突出了 BCTZ 薄膜在电可调应用中的潜力。