Outside Front Cover: The nonlocal to local transition of discharge regime can be induced by applying a transverse static magnetic field oriented parallel to the electrodes in capacitively coupled plasmas (CCP) for various discharge frequencies. The discharge transition happens when the ratio of cyclotron frequency (fast electron ~ 30eV) and discharge frequency (f_c/f_rf) is around 2.06. The discharge characteristics can thus be roughly predicted based on f_c/f_rf in magnetized CCP.

中文翻译：

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外封面：等离子工艺。聚合物。9/2021

外前盖：放电状态的非局部到局部转变可以通过在电容耦合等离子体 (CCP) 中应用平行于电极的横向静磁场来诱导，用于各种放电频率。当回旋频率（快电子~30eV）与放电频率（f _c / f _rf）之比为2.06左右时，发生放电跃迁。因此可以根据磁化 CCP 中的f _c / f _rf粗略预测放电特性。