This paper presents an anchor quality factor boosted thin-film Aluminum Nitride-On-Silicon length extensional mode microelectromechanical systems (MEMS) resonator supported by phononic crystal (PnC) strip-based tethers. The proposed PnC strip is a holed circle PnC strip. This proposed resonator is compared with the same resonator supported by two types of different tethers which are named one-quarter wavelength tether and circle PnC strip tether. Furthermore, the dependence of the bandgaps (BGs) of the proposed PnC strip on its geometrical dimensions is also investigated. The quality factor (Q) of the proposed resonator is compared with that of the resonator with other tether configurations. In addition, the impacts of the number of unit cell of the proposed PnC strip on the anchor quality factor (\(Q_{anchor}\)) and Q are also evaluated in this work. The designed resonator operates at approximately 133 MHz and the BG covers this resonant frequency is 33.24 MHz. The simulation results show that the \(Q_{anchor}\) and Q of the proposed resonator achieve higher than that for the counterparts. The average \(Q_{anchor}\) and Q of the resonator with the proposed PnC strip are superior to 1.8884 x\(10^8\%\) and 54767.38\(\%\) over that with the circle PnC strip. These values are 4.3195 x\(10^7\%\) and 19902.5\(\%\) as compared to the one with quarter-wavelength tether. The finite element (FE) analysis in COMSOL Multiphysics is utilized for the PnC strips and resonator simulation scenarios. MATLAB and EXCEL are applied to calculate the post processing simulation results .

本文提出了一种锚定品质因数增强的薄膜氮化铝硅基长度扩展模式微机电系统 (MEMS) 谐振器，该谐振器由基于声子晶体 (PnC) 的带状系绳支持。建议的 PnC 带是带孔的圆形 PnC 带。将该提议的谐振器与由两种不同的系绳支持的相同谐振器进行比较，这些系绳被命名为四分之一波长系绳和圆形 PnC 条系绳。此外，还研究了所提出的 PnC 条带的带隙 (BG) 对其几何尺寸的依赖性。将所提出的谐振器的品质因数 ( Q ) 与具有其他系绳配置的谐振器的品质因数进行比较。此外，所提出的 PnC 条的晶胞数量对锚定质量因子的影响（\(Q_{anchor}\) ) 和 Q 也在这项工作中进行了评估。设计的谐振器在大约 133 MHz 下运行，BG 覆盖的谐振频率为 33.24 MHz。仿真结果表明，所提出的谐振器的\(Q_{anchor}\)和Q比同类谐振器的要高。具有建议的 PnC 条的谐振器的平均\(Q_{anchor}\)和Q优于圆形 PnC 条的 1.8884 x \(10^8\%\)和 54767.38 \(\%\)。这些值是 4.3195 x \(10^7\%\)和 19902.5 \(\%\)与具有四分之一波长系绳的相比。COMSOL Multiphysics 中的有限元 (FE) 分析用于 PnC 条和谐振器仿真场景。应用MATLAB和EXCEL对后处理仿真结果进行计算。