A precise linear-rotary positioning stage (LRPS) for optical focusing based on the stick-slip mechanism was proposed. The proposed positioning stage could realize linear motion along the vertical direction and rotary motion around the vertical direction with both large stroke and high resolution. The configuration and operating principle of the proposed LRPS were introduced. The deflection model of the piezoelectric actuator (PEA) was established, and its frequency characteristic was analyzed. A prototype of the LRPS was fabricated, and then several experiments were performed to test its performance. The experiment results showed that the LRPS achieved linear motion with stroke of 5 mm and rotary motion with stroke of 360°. The resolutions of upward and downward linear motions were 82.32 nm and 86.26 nm, respectively. The resolutions of clockwise and anticlockwise rotary motions were 3.90 μrad and 3.85 μrad, respectively. Finally, the focusing operation was demonstrated, and images with high-resolution were obtained by adjusting the focusing of the imaging system.

提出了一种基于粘滑机构的用于光学聚焦的精密线性旋转定位平台（LRPS）。所提出的定位平台可以实现沿垂直方向的直线运动和绕垂直方向的旋转运动，具有大行程和高分辨率。介绍了所提议的 LRPS 的配置和工作原理。建立了压电致动器（PEA）的偏转模型，并分析了其频率特性。制造了LRPS的原型，然后进行了多次实验以测试其性能。实验结果表明，LRPS实现了5mm行程的直线运动和360°行程的旋转运动。向上和向下线性运动的分辨率分别为 82.32 nm 和 86.26 nm。顺时针和逆时针旋转运​​动的分辨率分别为 3.90 μrad 和 3.85 μrad。最后，演示了调焦操作，通过调整成像系统的调焦得到了高分辨率的图像。