Materials Science in Semiconductor Processing ( IF 4.2 ) Pub Date : 2021-09-03 , DOI: 10.1016/j.mssp.2021.106164 Yaqiong Li 1 , Chengcheng Liu 1 , Lifeng Zhang 2
This work focused on the effects of wettability on bulk Si growth from Si–Sn melts during the zone melting directional solidification. The wettability behaviors of Sn/Si, Si–90 wt%Sn/SiO2, and Si/SiO2 were investigated along with the micro-morphology observation. The results showed that the surface roughness of the Si substrate and the growth temperature were essential factors influencing the wettability evolution. The reaction between Si and O formed SiO2 layer on the Si substrate, which could introduce a gap at relatively low temperatures, and the released SiO gas due to the reaction between Si and SiO2 caused the instant Si growth.
中文翻译:
润湿性对通过区域熔化定向凝固从 Si-Sn 熔体中块体 Si 生长的影响
这项工作的重点是润湿性对区域熔化定向凝固过程中 Si-Sn 熔体的块体 Si 生长的影响。Sn/Si、Si–90 wt%Sn/SiO 2和Si/SiO 2的润湿行为与微观形貌观察一起进行了研究。结果表明,Si衬底的表面粗糙度和生长温度是影响润湿性演变的重要因素。Si 和 O 之间的反应在 Si衬底上形成 SiO 2层,这会在相对较低的温度下引入间隙,并且由于 Si 和 SiO 2之间的反应而释放的 SiO 气体导致瞬间 Si 生长。