One of the advantages of kinetic inductance detectors is their intrinsic frequency domain multiplexing capability. However, fabrication imperfections usually give rise to resonance frequency deviations, which create frequency collision and limit the array yield. Here, we study the resonance frequency deviation of a 4-in. kilo-pixel lumped-element kinetic inductance detector (LEKID) array using optical mapping. Using the measured resonator dimensions and film thickness, the fractional deviation can be explained within $\pm 25\times {10}^{-3}$, whereas the residual deviation is due to variation of electric film properties. Using the capacitor trimming technique, the fractional deviation is decreased by a factor of 14. The yield of the trimming process is found to be 97%. The mapping yield, measured under a 110 K background, is improved from 69% to 76%, which can be further improved to 81% after updating our readout system. With the improvement in yield, the capacitor trimming technique may benefit future large-format LEKID arrays.

中文翻译：

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了解并最小化 4 英寸的谐振频率偏差。千像素动态电感探测器阵列

动态电感检测器的优势之一是其固有的频域复用能力。然而，制造缺陷通常会引起共振频率偏差，从而产生频率冲突并限制阵列产量。在这里，我们研究了 4 英寸的谐振频率偏差。使用光学映射的千像素集总元件动态电感检测器 (LEKID) 阵列。使用测量的谐振器尺寸和薄膜厚度，可以解释分数偏差$\pm 25\times {10}^{-3}$，而残余偏差是由于电膜特性的变化。使用电容器微调技术，分数偏差减少了 14 倍。微调过程的良率达到 97%。在 110 K 背景下测得的映射率从 69% 提高到 76%，更新我们的读出系统后可以进一步提高到 81%。随着产量的提高，电容器微调技术可能有益于未来的大型 LEKID 阵列。