In this paper, based on the mechanism of oxygen inhibiting the curing of acrylate-based monomers, the reaction kinetics model for the formation of the oxygen inhibition zone is established. This model is applied to study the variation of the thickness of the oxygen inhibition zone with the process parameters and the microscopic characteristics of the constrained substrate with the PDMS film as the oxygen permeation window. Experiments are performed on substrates with different micropore area ratios, and the experimental results are in good agreement with the simulation. The research results show that the thickness of the oxygen inhibition zone can be up to 28 µm while the thickness of cured layer can be over 140 µm. The thickness of the oxygen inhibition zone increases with the increasing PDMS film diffusion coefficient, oxygen concentration, constrained substrate area ratio, and micropore size, but decreases with the increasing light intensity, photoinitiator concentration, and PDMS film thickness. When the micropore area ratio are too small, or the micropore diameter is too large under the same area ratio, an obvious periodic microstructure will appear on the surface of the cured layer, affecting the quality of the cured layer surface.

本文基于氧抑制丙烯酸酯类单体固化的机理，建立了氧抑制区形成的反应动力学模型。该模型用于研究阻氧区厚度随工艺参数的变化以及以PDMS薄膜为透氧窗口的受限基板的微观特性。在不同微孔面积比的基材上进行了实验，实验结果与模拟吻合较好。研究结果表明，氧抑制区的厚度可达28 µm，固化层厚度可达140 µm以上。随着PDMS薄膜扩散系数、氧浓度、受限制的基板面积比和微孔尺寸，但随着光强度、光引发剂浓度和 PDMS 膜厚度的增加而减小。当微孔面积比过小，或相同面积比下微孔直径过大时，固化层表面会出现明显的周期性微观结构，影响固化层表面质量。