Mesoporous TiO₂ thin films have been extensively studied and applied in the construction of a wide variety of devices. To this end, it is critical to obtain detailed structural information regarding film formation and processing. However, there is still a lack of information about their chemical identity during thermal treatment, in which a transition from a hybrid mesostructure to a mesoporous matrix occurs. In this work, we present the FTIR characterization of three different mesoporous TiO₂ films, templated with Brij 58, Pluronic F127 and Pluronic P123. The FTIR spectra were followed in situ from the sol deposition, through the thermal treatments until reaching 400 °C, using a high temperature cell. A detailed analysis taking into account all of the sol’s components and all the spectral regions in the range 3600–650 cm⁻¹ was performed. The results obtained were compared with thermal analysis, coupled with mass spectrometry analysis of the released species. By this means, all the stages of the processing (solvent evaporation, template elimination and precursors condensation) were identified, and we were able to determine which chemical species are present at every treatment step. The results presented here can be useful when choosing processing conditions adapted for the final application of the TiO₂ films.

介孔 TiO ₂薄膜已被广泛研究并应用于构建各种器件。为此，获得有关薄膜形成和加工的详细结构信息至关重要。然而，在热处理过程中仍然缺乏关于它们的化学特性的信息，其中发生从混合介孔结构到介孔基质的转变。在这项工作中，我们展示了三种不同介孔 TiO ₂的 FTIR 表征使用 Brij 58、Pluronic F127 和 Pluronic P123 模板化的电影。从溶胶沉积到热处理直至达到 400 °C，使用高温池原位跟踪 FTIR 光谱。考虑到所有溶胶成分和 3600-650 cm ^-1范围内的所有光谱区域的详细分析进行了。将获得的结果与热分析以及释放物质的质谱分析相比较。通过这种方式，确定了处理的所有阶段（溶剂蒸发、模板消除和前体冷凝），我们能够确定每个处理步骤中存在哪些化学物质。在选择适用于 TiO ₂薄膜最终应用的加工条件时，此处提供的结果可能很有用。