In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

中文翻译：

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不同偏振组合的多束激光干涉微结构制造理论研究

在这项研究中，我们系统而全面地研究了偏振角对多光束激光干涉光刻技术制造微结构的影响。通过理论分析和模拟，我们研究了不同的极化组合，即横向电（TE）和横向磁（TM）极化组合，对三束、四束和六束制造的微结构特性的影响。激光干涉光刻。我们成功地获得了具有不同周期图案的微结构，例如蜂窝点、准椭圆点、不同的方形点和准三角形点。模拟结果表明极化影响干涉图案、图案对比和周期的形成。本文所讨论的方法简单、成本低、