To overcome the performance limitations of quartz microelectromechanical system (QMEMS) gyroscopes, which are extensively employed in various applications, a method was developed in this study to effectively reduce the zero-output error, which is primarily caused by the anisotropy of the quartz crystal. The proposed method increases the gold counterweights at the end of the tuning fork beam and trims them to reduce the zero-output error. First, the vibrations were determined by conducting a theoretical analysis of ideal and non-ideal gyroscopes. A finite element analysis and simulation were then performed on gyroscope models with five structures, and the influences of different crystal edge positions and counterweight trimming methods on the vibrations and outputs of the gyroscopes were simulated. Thereafter, by analyzing the simulation and experimental results, we verified that the addition of counterweights and an error-eliminating method can reduce the zero-output error of QMEMS gyroscopes, and that specific alternative methods can achieve similar results.

为了克服广泛应用于各种应用的石英微机电系统 (QMEMS) 陀螺仪的性能限制，本研究开发了一种方法来有效降低零输出误差，这主要是由石英晶体的各向异性引起的。所提出的方法增加了音叉梁末端的金配重并对其进行了修整以减少零输出误差。首先，通过对理想和非理想陀螺仪进行理论分析来确定振动。然后对五种结构的陀螺模型进行有限元分析和仿真，模拟了不同晶体边缘位置和配重微调方法对陀螺振动和输出的影响。此后，