Abstract

As the electronic device market has expanded, image sensors have attracted much attention. In order to develop a high performance image sensor, the unit pixel size of the image sensor is gradually decreasing. In order to make the decreased pixel size, the method using the pigment mill base has a limitation in finely dividing the particles, and a method using a dye which is soluble in a solvent is required. In this study, blue photoresist mixture (1:1 wt%) using a dye and a pigment was prepared by mixing a blue dye of ABD having high optical property and a blue pigment of PAQ having high thermal and chemical stability. After commercial thermal treatment of photoresist mixture, transmittance showed more than 80% and △Eab of ABD-PAQ was 1.50, which is superior thermal property to ABD. In case of chemical stability treatment, △Eab values of ABD and ABD-PAQ were 0.86 and 0.66, which means that ABD-PAQ shows high chemical stability. These improvement comes from the high thermal and chemical stability of PAQ moiety as well as the high absorption property of ABD moiety. As a result, it was confirmed that the blue hybrid spin-coated film mixed with the blue dye and the pigment showed excellent thermal stability compared with the dye-based spin-coated flim.

摘要

随着电子设备市场的扩大，图像传感器备受关注。为了开发高性能的图像传感器，图像传感器的单位像素尺寸逐渐减小。为了减小像素尺寸，使用颜料研磨剂的方法在细化颗粒方面存在限制，并且需要使用可溶于溶剂的染料的方法。在这项研究中，通过混合具有高光学性能的 ABD 蓝色染料和具有高热稳定性和化学稳定性的 PAQ 蓝色颜料，制备了使用染料和颜料的蓝色光刻胶混合物 (1:1 wt%)。光刻胶混合物经商业热处理后，透光率达80%以上，ABD-PAQ的△Eab为1.50，热性能优于ABD。在化学稳定性处理的情况下，△ABD和ABD-PAQ的Eab值分别为0.86和0.66，说明ABD-PAQ具有较高的化学稳定性。这些改进来自于 PAQ 部分的高热稳定性和化学稳定性以及 ABD 部分的高吸收特性。结果证实，与基于染料的旋涂薄膜相比，混合有蓝色染料和颜料的蓝色混合旋涂薄膜显示出优异的热稳定性。