Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit,Nano Letters

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Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit
Nano Letters ( IF 9.6 ) Pub Date : 2021-08-30 , DOI: 10.1021/acs.nanolett.1c02237
Robin J Dolleman _{1,

2} , Debadi Chakraborty ₂ , Daniel R Ladiges _{2,

3} , Herre S J van der Zant ₁ , John E Sader ₂ , Peter G Steeneken _{1,

4}

Affiliation

The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing applications. Here, we study the squeeze-film effect in single-layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials.

中文翻译：

高压极限下原子薄谐振器的挤膜效应

膜的谐振频率取决于由于挤压膜效应而产生的气体压力，挤压膜效应是由高频运动捕获在谐振器下方的薄膜压缩引起的。这种效应在低质量石墨烯膜中尤其大，这使得它们成为压力传感应用的有希望的候选者。在这里，我们研究了单层石墨烯谐振器中的挤压薄膜效应，发现它们的谐振频率低于假设理想压缩的模型的预期频率。为了理解这种偏差，我们进行了玻尔兹曼和连续有限元模拟，并提出了一种改进的模型，其中包括气体泄漏的影响，并且可以解释观察到的共振频率的压力依赖性。因此，这项工作提供了对挤压膜效应的进一步理解，并为优化二维材料挤压膜压力传感器的设计提供了进一步的方向。

更新日期：2021-09-22

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