This letter demonstrates the fabrication and characterization of externally switchable electro-permanent magnets (EPMs) microfabricated on silicon wafers. Each EPM comprises a thick-film bilayer of electroplated cobalt-platinum as the hard magnetic phase and screen-printed aluminum-nickel-cobalt/polydimethylsiloxane composite as the soft magnetic phase. The selected magnetic materials and corresponding fabrication methods are compatible with standard semiconductor processes, which enable batch fabrication capability for low-cost and system-on-chip integration. An on/off magnetic moment ratio of 265 is achieved for the miniaturized 3.6 mm × 3.6 mm × 0.3 mm EPM devices by varying the volume ratio of the constituent materials. Scanning electron microscopy and vibrating sample magnetometry are used to characterize the microscopic structure and magnetic performance of the fabricated devices, respectively.

中文翻译：

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使用 AlNiCo 和 CoPt 的微加工电永磁体


这封信演示了硅晶圆上微加工的外部可切换电永磁体 (EPM) 的制造和表征。每个 EPM 均包含作为硬磁相的电镀钴铂厚膜双层和作为软磁相的丝网印刷铝镍钴/聚二甲基硅氧烷复合材料。所选磁性材料和相应的制造方法与标准半导体工艺兼容，从而实现批量制造能力，实现低成本和片上系统集成。通过改变组成材料的体积比，小型化的 3.6 mm × 3.6 mm × 0.3 mm EPM 器件的开/关磁矩比达到 265。扫描电子显微镜和振动样品磁力测量分别用于表征所制造器件的微观结构和磁性能。