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Slicing parameter optimization based on wire net dynamic reliability constraint in multi-wire saw
Materials Science in Semiconductor Processing ( IF 4.2 ) Pub Date : 2021-08-30 , DOI: 10.1016/j.mssp.2021.106144
Zhen Li 1, 2 , Xi Wang 1 , Guohe Li 2 , Tao Zhang 1 , Xin He 1
Affiliation  

Multi-wire sawing technology has become the mainstream method to slice crystalline silicon for solar cells and integrated circuits due to its processing efficiency, high yield, and easy adaption to the trend of large diameters. However, wire breakage due to unreasonable process parameters can cause heavy losses during slicing. The complexity of the slicing process and lack of theoretical guidance are the root causes. To solve these problems, a wire net dynamic reliability assessment method based on reliability theory is established based on a Weibull distribution and wire net series discrete model. The forces on the wire in the slicing process are analyzed to obtain the resultant force of the dynamic process. Experiments are conducted, and the influence of tension, wire bow angle, speed, acceleration, and contact length on wire net dynamic reliability is analyzed. The results show that the factors affecting wire net dynamic reliability are, in descending order of importance, wire bow angle, wire tension, wire net maximum wear loss, contact length, wire acceleration and wire speed. The wire net dynamic reliability varies exponentially with the bow angle and tension. Values less than 2.5° and 16 N, respectively, have a minor influence on the wire net dynamic reliability. However, when these are more than 4.5° and 20 N, the wire net dynamic reliability decreases dramatically. In the ranges of the two thresholds, the wire net dynamic reliability decreases slowly with the increase of the wire bow angle and tension. The other two parameters, wire speed and acceleration, have similar trend with wire net dynamic reliability. But their impact is not significant within the usual parameter ranges. Wire net maximum wear loss is importent parameter for the reliability. With the increase of wire net maximum wear loss, the wire net dynamic reliability decreases approximately linearly. On the contrary, wire net dynamic reliability increases linearly with the increase of contact length. The establishment of the model provides a theoretical basis for the reasonable determination of process parameters and the prevention of wire breakage.



中文翻译:

基于线网动态可靠性约束的多线锯切片参数优化

多线锯切技术以其加工效率高、成品率高、易适应大直径趋势等优点,成为太阳能电池和集成电路晶体硅切片的主流方法。但是,由于工艺参数不合理造成的断线会在切片过程中造成重大损失。切片过程的复杂和缺乏理论指导是根本原因。针对这些问题,基于威布尔分布和线网级数离散模型,建立了基于可靠性理论的线网动态可靠性评估方法。分析切片过程中线材上的力,以获得动态过程的合力。进行了实验,张力、线弓角度、速度、加速度、并分析了接触长度对线网动态可靠性的影响。结果表明,影响丝网动态可靠性的因素按重要性从高到低依次为:丝弓角度、丝张力、丝网最大磨损量、接触长度、丝加速度和丝速度。钢丝网动态可靠性随船首角度和张力呈指数变化。分别小于 2.5° 和 16 N 的值对线网动态可靠性的影响较小。然而,当这些大于 4.5°和 20 N 时,线网动态可靠性急剧下降。在两个阈值范围内,丝网动态可靠性随着丝弓角度和张力的增加而缓慢下降。另外两个参数,线速和加速度,与线网动态可靠性有相似的趋势。但它们的影响在通常的参数范围内并不显着。钢丝网最大磨损量是可靠性的重要参数。随着丝网最大磨损损耗的增加,丝网动态可靠性近似线性下降。相反,金属丝网的动态可靠性随着接触长度的增加而线性增加。模型的建立为工艺参数的合理确定和断线的预防提供了理论依据。

更新日期:2021-08-30
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