Laser precision cutting of polydimethylsiloxane (PDMS) films technology will greatly promote development of flexible electronics industry. However, mechanism and optimization method of PDMS films laser cutting is still unclear. On one hand, mechanism of ultraviolet (UV) nanosecond laser precision cutting of PDMS films with laser ablation as the core was explored based on analysis of by-product components. On the other hand, laser cutting quality optimization method of heat generation- diffusion co-regulation was proposed based on the mechanism of laser ablation. The minimum width of the groove and the heat affected zone were obtained by regulating the heat generation process at room temperature, 67.1 ± 1.7 μm and 6.8 ± 0.8 μm, respectively. In addition, the heat diffusion process can be regulated by lowering ambient temperature to further optimize the quality of cut. Using this optimization method, a spring-shape flexible electrode was prepared, and circumferential stretch limit of this spring-shape flexible electrode has been increased from 10% to 150% compared with planar PDMS film flexible electrodes.

聚二甲基硅氧烷（PDMS）薄膜的激光精密切割技术将极大地促进柔性电子产业的发展。然而，PDMS薄膜激光切割的机理和优化方法仍不清楚。一方面，在分析副产物成分的基础上，探索了以激光烧蚀为核心的紫外（UV）纳秒激光精密切割PDMS薄膜的机理。另一方面，基于激光烧蚀机理，提出了发热-扩散协同调控的激光切割质量优化方法。通过调节室温下的发热过程，得到凹槽和热影响区的最小宽度，分别为67.1±1.7μm和6.8±0.8μm。此外，可以通过降低环境温度来调节热扩散过程，以进一步优化切割质量。使用这种优化方法，制备了弹簧形柔性电极，与平面PDMS薄膜柔性电极相比，该弹簧形柔性电极的周向拉伸极限从10%提高到150%。