Microelectronics Reliability ( IF 1.6 ) Pub Date : 2021-08-24 , DOI: 10.1016/j.microrel.2021.114338 Ananya Roy 1 , M. Nabi 1
Eletrothermal microgrippers are nowadays commonly used as they are small in size, low cost and easy to manufacture. Modeling of these microgrippers is challenging as most of the systems are described in partial differential equations. The microgripper is modeled through finite element method, producing a large number of ordinary differential equations, thus making model order reduction a fruitful proposition. During the design process, it has been seen that few material properties of gold and SU-8 polymer change nonlinearly with the change in generated heat making the system nonlinear. Hence, nonlinear model order reduction methods are applied here. The effectiveness of the reduction method is shown through simulation results at various levels.
中文翻译:
采用 POD-DEIM 和 POD 方法的 MEMS 电热微夹具建模
电热微夹持器由于尺寸小、成本低且易于制造,因此现在普遍使用。这些微夹具的建模具有挑战性,因为大多数系统都在偏微分方程中描述。微夹具通过有限元方法建模,产生大量常微分方程,从而使模型降阶成为一个富有成效的命题。在设计过程中,我们发现金和 SU-8 聚合物的材料特性很少会随着产生的热量的变化而非线性变化,从而使系统成为非线性。因此,这里应用非线性模型降阶方法。减少方法的有效性通过不同级别的模拟结果显示。