Abstract

Visualization of nanorelief measurements by a scanning tunneling microscope is a built-in function of the control system, which takes into account the peculiarities of the device’s operation. In order to improve the distinguishability of small formations, measurements are projected onto the underlying plane, which is chosen so that the height difference of the entire set of points is as small as possible. The relative height of a relief point is visualized using the gradient shading method. This paper proposes a method for increasing the accuracy of presenting the measurement results, which is based on the use of the standard functions of the control system’s software. The experimental results show that the proposed solution significantly improves the distinguishability of small details of a nanorelief.

中文翻译：

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提高隧道显微镜测量的精度

摘要

扫描隧道显微镜对纳米浮雕测量的可视化是控制系统的内置功能，它考虑了设备操作的特性。为了提高小地层的可区分性，将测量值投影到下面的平面上，选择该平面以使整个点集的高度差尽可能小。使用梯度着色方法可视化浮雕点的相对高度。本文提出了一种提高测量结果呈现精度的方法，该方法基于使用控制系统软件的标准功能。实验结果表明，所提出的解决方案显着提高了纳米浮雕小细节的可区分性。