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The influence of chromatic aberration on the dose-limited spatial resolution of transmission electron microscopy
Ultramicroscopy ( IF 2.2 ) Pub Date : 2021-08-18 , DOI: 10.1016/j.ultramic.2021.113383
Eduardo Ortega 1 , Chris Boothroyd 2 , Niels de Jonge 3
Affiliation  

The effect of chromatic aberration (CC) on the spatial resolution in transmission electron microscopy (TEM) was studied in thick specimens in which the sample becomes the limiting factor in the resolution. The sample influences the energy spread of the electron beam, allows only a limited electron dose, and modulates electron scattering events. The experimental set-up consisted of a thin silicon nitride membrane and a silicon wedge containing gold nanoparticles. The resolution was measured as a function of electron dose and sample thickness for different sample configurations and for different microscopy modalities including regular TEM, energy filtered TEM (EFTEM) and CC-corrected TEM. Comparison with an analytical model aided the understanding of the experimental data applied over varied conditions. The general trend for all microscopy modalities was a transition from a noise-limited resolution at low electron dose to a CC-limited resolution at high-dose in the absence of beam blurring. EFTEM required an accurate energy slit offset and an optimal energy spread to energy-slit width ratio to surpass regular TEM. The key advantage of CC correction appeared to be the best possible resolution for larger sample thickness at low electron dose outperforming EFTEM by about fifty percent. Several hypothetical sample configurations relevant to liquid phase electron microscopy were evaluated as well to demonstrate the capabilities of the analytical model and to determine the most optimal microscopy modality for this type of experiment. The analytical model included an automated optimization of the EFTEM settings and may aid in optimizing the sample-limited resolution for experimental analysis and planning.



中文翻译:

色差对透射电子显微镜剂量限制空间分辨率的影响

色差 (CC) 对透射电子显微镜 (TEM) 空间分辨率的影响在厚样品中进行了研究,其中样品成为分辨率的限制因素。样品影响电子束的能量扩散,只允许有限的电子剂量,并调节电子散射事件。实验装置由薄氮化硅膜和含有金纳米颗粒的硅楔组成。对于不同的样品配置和不同的显微镜模态,包括常规 TEM、能量过滤 TEM (EFTEM) 和 CC 校正 TEM,分辨率测量为电子剂量和样品厚度的函数。与分析模型的比较有助于理解在不同条件下应用的实验数据。所有显微镜模式的总体趋势是从低电子剂量下的噪声限制分辨率过渡到在没有光束模糊的情况下在高剂量下的 CC 限制分辨率。EFTEM 需要准确的能量狭缝偏移和最佳能量扩散与能量狭缝宽度比,以超过常规 TEM。CC 校正的主要优势似乎是在低电子剂量下较大样品厚度的最佳分辨率,其性能优于 EFTEM 约 50%。还评估了与液相电子显微镜相关的几种假设样品配置,以证明分析模型的能力并确定此类实验的最佳显微镜模式。

更新日期:2021-08-24
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