Advances in optical testing are as important as advances in fabrication because one can make only what one can measure. A high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision metrology, laser radar, or contact-probe-based coordinate measuring machines (CMM) to accurately measure surfaces with large form error. This nearly universal optical testing method employs a precision CMM equipped with a non-contact, confocal probe. This technique was developed to characterize and align a broad spectrum of optical surfaces including ones with high slopes that are nearly impossible to measure using traditional interferometric testing without custom-made optics. Optical components covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were processed using custom-developed routines to determine the optic’s alignment, the departure from design surface, and the as-built prescription parameters. This information was used to verify and guide the development and fabrication of novel optics.

中文翻译：

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使用坐标测量法测量大振幅表面图形误差

光学测试的进步与制造的进步同样重要，因为人们只能制造可以测量的东西。利用高精度计量能力来缩小干涉测试与低精度计量、激光雷达或基于接触探针的坐标测量机 (CMM) 之间的差距，以精确测量具有较大形状误差的表面。这种几乎通用的光学测试方法采用配备非接触式共焦探头的精密 CMM。这种技术的开发是为了表征和校准广泛的光学表面，包括那些具有高斜率的表面，如果没有定制的光学器件，使用传统的干涉测试几乎不可能测量到这些表面。光学元件覆盖范围广，如大凸圆锥、高斜度非球面、成功测量了掠入射 X 射线光学器件和高度变形的平面。所得数据使用定制开发的程序进行处理，以确定光学器件的对准、偏离设计表面和竣工处方参数。该信息用于验证和指导新型光学器件的开发和制造。