Thin film batteries often contain oxides in anode, cathode, and electrolyte materials. In-operando methods capable of Li and O depth profiling are relevant for battery research to study e.g., diffusion and trapping of constituents. Here, we demonstrate ion beam based analytical methods with high depth resolution and sensitivity for depth profiling Li and O in thin film batteries using 10 MeV Li and He ions. Simultaneous depth profiling of Li and O was performed using combined coincidence ERDA and RBS measurements in the battery with 8 MeV He ions, and the Li and O transport was measured in operando. Reversible Li transport was observed from the LMO anode to the NbO cathode upon charging and vice versa during discharging. O transport was observed from the LMO anode to the NbO cathode upon first charging with 3.5 V but was not observed upon further charging and discharging of battery. Our in-operando measurements allow direct and quantitative observation of Li and O transport during charge-discharge cycles for thin film batteries.

薄膜电池通常在阳极、阴极和电解质材料中含有氧化物。能够进行 Li 和 O 深度分析的操作中方法与电池研究相关，以研究成分的扩散和捕获。在这里，我们展示了基于离子束的具有高深度分辨率和灵敏度的分析方法，用于使用 10 MeV Li 和 He 离子对薄膜电池中的 Li 和 O 进行深度分析。使用 8 MeV He 离子在电池中使用组合符合 ERDA 和 RBS 测量对 Li 和 O 进行同时深度分析，并在操作中测量 Li 和 O 传输。在充电时观察到从 LMO 阳极到 NbO 阴极的可逆锂传输，在放电期间反之亦然。在第一次用 3 充电时，观察到从 LMO 阳极到 NbO 阴极的 O 传输。5 V，但在电池进一步充电和放电时未观察到。我们的操作中测量允许在薄膜电池的充放电循环期间直接和定量观察 Li 和 O 的传输。