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Ultrananocrystalline diamond-like carbon (UN-DLC) assembled on epitaxial ZnO film by PLD technique and SIMS Raman Rutherford spectroscopic fingerprint investigation
Journal of Raman Spectroscopy ( IF 2.4 ) Pub Date : 2021-08-16 , DOI: 10.1002/jrs.6216 Manikandan Elayaperumal 1, 2, 3 , Kavitha Gnanasekaran 2, 3, 4 , Mathew K. Moodley 2, 3, 5 , Bonex Wakufwa Mwakikunga 3, 6, 7, 8 , Ravinder Gaur 9 , Siva Umapathy 10 , Rasiah Ladchumananandasivam 11 , Malik Maaza 2, 3
Journal of Raman Spectroscopy ( IF 2.4 ) Pub Date : 2021-08-16 , DOI: 10.1002/jrs.6216 Manikandan Elayaperumal 1, 2, 3 , Kavitha Gnanasekaran 2, 3, 4 , Mathew K. Moodley 2, 3, 5 , Bonex Wakufwa Mwakikunga 3, 6, 7, 8 , Ravinder Gaur 9 , Siva Umapathy 10 , Rasiah Ladchumananandasivam 11 , Malik Maaza 2, 3
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Nanocomposite materials coating opens up tremendous opportunities in the development of commercial products for household to industrial applications. In this present article, we are reporting the formation of 10-nm carbon (C) layer underneath the 6-nm ZnO epitaxial thin-film grown on simple quarts or Si(100) substrate by pulsed laser deposition. As-obtained nanocrystalline carbon layers between the Si(100) and ZnO and above ZnO epitaxial film were studied by micro-Raman, secondary ion mass (SIMS), and resonant Rutherford backscattering (RRBS) spectroscopic methods. The carbon diffusivity analysis revealed that the diffusion at nanoscale is governed predominantly by a nonlinear Fick's law rather than the Soret-Ludwig law. Quantum diffusion dominates the classical diffusion and carbon diffusivity into ZnO layer and was found to be ~7.8 × 10−12 cm2 s−1. This diffusion explains the doping profiles of ZnO layer up to its surface where carbon packing suggests presence of ultrananocrystalline-diamond-like-carbon (UN-DLC) thin films revealed by Raman spectroscopy.
中文翻译：
通过PLD技术和SIMS拉曼卢瑟福光谱指纹研究在外延ZnO薄膜上组装超纳米晶金刚石碳（UN-DLC）
纳米复合材料涂层为家庭到工业应用的商业产品的开发开辟了巨大的机遇。在本文中，我们报告了通过脉冲激光沉积在简单石英或 Si(100) 衬底上生长的 6 nm ZnO 外延薄膜下方形成 10 nm 碳 (C) 层。通过微拉曼、二次离子质量 (SIMS) 和共振卢瑟福背散射 (RRBS) 光谱方法研究了在 Si(100) 和 ZnO 以及以上 ZnO 外延膜之间获得的纳米晶碳层。碳扩散率分析表明，纳米级的扩散主要受非线性 Fick 定律而非 Soret-Ludwig 定律支配。量子扩散支配着经典扩散和碳扩散到 ZnO 层，并被发现为 ~7.8 × 10-12 厘米2 秒-1。这种扩散解释了 ZnO 层直至其表面的掺杂分布，其中碳堆积表明拉曼光谱揭示了超纳米晶金刚石样碳 (UN-DLC) 薄膜的存在。
更新日期：2021-08-16
中文翻译：
通过PLD技术和SIMS拉曼卢瑟福光谱指纹研究在外延ZnO薄膜上组装超纳米晶金刚石碳（UN-DLC）
纳米复合材料涂层为家庭到工业应用的商业产品的开发开辟了巨大的机遇。在本文中，我们报告了通过脉冲激光沉积在简单石英或 Si(100) 衬底上生长的 6 nm ZnO 外延薄膜下方形成 10 nm 碳 (C) 层。通过微拉曼、二次离子质量 (SIMS) 和共振卢瑟福背散射 (RRBS) 光谱方法研究了在 Si(100) 和 ZnO 以及以上 ZnO 外延膜之间获得的纳米晶碳层。碳扩散率分析表明，纳米级的扩散主要受非线性 Fick 定律而非 Soret-Ludwig 定律支配。量子扩散支配着经典扩散和碳扩散到 ZnO 层，并被发现为 ~7.8 × 10-12 厘米2 秒-1。这种扩散解释了 ZnO 层直至其表面的掺杂分布，其中碳堆积表明拉曼光谱揭示了超纳米晶金刚石样碳 (UN-DLC) 薄膜的存在。
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