Abstract

Using vanadium oxide (VO_x) thin film as active layer, microbolometer with gold black absorber was fabricated due to the high mid-infrared (8-14μm) absorption property of gold black. This paper describes the design and fabrication of microbolometer with micromachining surface technology. The characteristics of the device are investigated. The detector performance exhibits maximum detectivity of 1.96 × 10⁸cmHz^1/2/W at 17 Hz with 8.8μA.

中文翻译：

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集成在金黑吸收层中的VOx微测辐射热计的制作及特性

摘要

以氧化钒（VO _x）薄膜为活性层，利用金黑对中红外（8-14μm）的高吸收特性，制作了带有金黑吸收体的微测辐射热计。本文介绍了采用微加工表面技术的微测辐射热计的设计和制造。设备的特性进行了研究。检测器性能在 17 Hz 和 8.8μA 下表现出 1.96 × 10 ⁸ cmHz ^1/2 /W 的最大检测率。