Stereometric analysis of Ti1−xAlxN thin films deposited by direct current/radio frequency magnetron sputtering,Microscopy Research and Technique

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Stereometric analysis of Ti1−xAlxN thin films deposited by direct current/radio frequency magnetron sputtering
Microscopy Research and Technique ( IF 2.0 ) Pub Date : 2021-08-14 , DOI: 10.1002/jemt.23905
Robert Saraiva Matos _{1,

2} , Henrique Duarte da Fonseca Filho ₃ , Abhijeet Das ₄ , Sanjeev Kumar ₄ , Vipin Chawla ₅ , Ştefan Ţălu ₆

Affiliation

A study of image analysis of Ti_1−xAl_xN films deposited on corning glass substrates by a direct current (DC)/radio frequency (RF) magnetron sputtering system was performed. Atomic force microscopy (AFM) data were studied to understand how the impact of the concentration of Al content influences the 3D surface morphology as well as the surface texture parameters. The results showed that the superficial morphology was modified by the increase of Al content in the Ti_1−xAl_xN films, as well as the surface microtexture. It has also been observed that the Ti_1−xAl_xN film surface with the highest aluminum (Al) doping concentration presented a similar surface morphology to pristine titanium nitride (TiN) thin films. The Abbott-Firestone curves for all films exhibited an S-like shape suggesting topographic uniformity and Gaussian distribution of heights. An increase in surface uniformity is observed with Al concentration. The characterization of the surface morphology of Ti_1−xAl_xN films by the evaluation of surface statistical parameters suggests that the surface topography can be adjusted by suitable doping of aluminum and offers a deeper understanding of the applicability of these films.

中文翻译：

通过直流/射频磁控溅射沉积的 Ti1−xAlxN 薄膜的立体分析

对通过直流 (DC)/射频 (RF) 磁控溅射系统沉积在康宁玻璃基板上的 Ti _{1- x} Al _x N 薄膜进行了图像分析研究。研究了原子力显微镜 (AFM) 数据，以了解 Al 含量浓度的影响如何影响 3D 表面形态以及表面纹理参数。结果表明，Ti _{1- x} Al _x N 薄膜中Al 含量的增加以及表面微观结构改变了表面形貌。还观察到 Ti _{1- x} Al _x具有最高铝 (Al) 掺杂浓度的 N 膜表面呈现出与原始氮化钛 (TiN) 薄膜相似的表面形态。所有薄膜的 Abbott-Firestone 曲线都显示出类似 S 的形状，表明地形均匀性和高度的高斯分布。随着铝浓度的增加，观察到表面均匀性的增加。通过评估表面统计参数对 Ti _{1- x} Al _x N 薄膜的表面形貌进行表征表明，可以通过适当的铝掺杂来调整表面形貌，并且可以更深入地了解这些薄膜的适用性。

更新日期：2021-08-14

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