Fabrication of optical components such as passive optics (mirrors, prisms, lenses) or active optics (polarizer’s, laser gain media, adaptive optics) starts from a bulk material and reaches to the required size and shape. To achieve the required specification of the component, a series of process has to be followed from grinding to polishing stage. Initially, in grinding stage, material removal is faster, with more surface damage and less geometric control. During polishing stage, material removal is slower, with no surface damage but with greater geometric control. Hence, to achieve good surface quality, the component or work piece has to be controlled from grinding stage. We present an advanced surface and fractal analysis study on fused silica samples processed with different grit sizes such as 3, 5, 12, and 25 μm aluminium oxide (Al₂O₃) abrasives. The maximum sub surface damage (SSD) with respect to size of the abrasive grain ranged between 30 μm to 5 μm in empirical module. In theoretical module it varied from 45 μm to 5.4 μm for fused silica glass, mediated with loose abrasive aluminium oxide powder of 25 μm and 3 μm respectively. An experimental investigation is reported on the increasing effect of Al₂O₃ grit sizes on the surface topography such as average roughness (Ra), which varied from 57 nm to 847 nm for 3 μm and 25 μm Al₂O₃ abrasives respectively. Three-dimensional image analysis was captured through Phase Shift Interferometry (PSI) and Coherence Correlation Interferometer (CCI) technique. Field Emission Scanning Electron Microscope (FESEM) technique was utilized to characterize the Al₂O₃ powders and the processed fused silica samples. Later, the images have been analysed using two-dimensional multifractal detrended fluctuation analysis (2D-MFDFA) to understand and confirm the multiple fractal nature on fused silica samples caused by varying grit size of Al₂O₃ abrasives.

诸如无源光学器件（镜子、棱镜、透镜）或有源光学器件（偏振器、激光增益介质、自适应光学器件）等光学元件的制造从大块材料开始，并达到所需的尺寸和形状。为了达到所需的组件规格，必须遵循从研磨到抛光阶段的一系列过程。最初，在研磨阶段，材料去除速度更快，表面损伤更多，几何控制更少。在抛光阶段，材料去除速度较慢，没有表面损伤，但几何控制更好。因此，为了获得良好的表面质量，必须从磨削阶段控制部件或工件。我们对用不同粒度（例如 3、5、12 和 25 μ）处理的熔融石英样品进行了高级表面和分形分析研究m 氧化铝（Al ₂ O ₃）磨料。相对于所述磨料颗粒的尺寸最大的子表面损伤（SSD）之间不等30 μ m至5 μ经验模块中米。在理论模块它从45变化μ m至5.4 μ为熔融石英玻璃米，以25松散磨料氧化铝粉末介导μ m和3 μ分别微米。的实验研究报道对Al提高效果₂ ö ₃上的表面形貌砂砾尺寸，如平均粗糙度（Ra），其从57纳米变化到847纳米为3 μ m和25 μ级的Al₂ O ₃磨料。通过相移干涉仪 (PSI) 和相干相关干涉仪 (CCI) 技术捕获三维图像分析。场发射扫描电子显微镜(FESEM) 技术被用来表征Al ₂ O ₃粉末和加工过的熔融石英样品。后来，使用二维多重分形去趋势波动分析 (2D-MFDFA) 对图像进行了分析，以了解和确认由不同的 Al ₂ O ₃磨料粒度引起的熔融石英样品的多重分形性质。