Formaldehyde (HCHO) gas sensing properties of a new sensor based on a sputtered vanadium pentoxide (V₂O₅) thin film decorated with evaporated gold (Au) nanoparticles (NPs) are studied and reported herein. The use of Au NPs effectively increases the surface area/volume (S_A/V) ratio and enhances the catalytic activity of Au metal. Experimentally, good p-type sensing characteristics, including a high sensing response ratio of 73.1% under 20 ppm HCHO/air gas and a small recovery time of 6.8 s at 225 C, are obtained. An extremely low detecting level of 15 ppb HCHO/air is also acquired. Due to these advantages and the benefits of simple structure and easy fabrication, the studied Au NP/V₂O₅ device is an excellent candidate for p-type consumption formaldehyde gas sensing and complementary metal oxide sensor array (CMOSA) applications.

本文研究并报告了基于溅射的五氧化二钒 (V ₂ O ₅ ) 薄膜的新型传感器的甲醛 (HCHO) 气敏特性，该薄膜装饰有蒸发的金 (Au) 纳米颗粒 (NP)。使用金纳米粒子有效地增加了表面积/体积（S_阿/ V）的比例，并提高Au金属的催化活性。实验上，获得了良好的 p 型传感特性，包括在 20 ppm HCHO/空气气体下的 73.1% 的高传感响应比和 225°C 下 6.8 秒的小恢复时间。还获得了 15 ppb HCHO/空气的极低检测水平。由于这些优点以及结构简单、易于制造的优点，所研究的 Au NP/V ₂ O ₅ 该器件是 p 型消耗甲醛气体传感和互补金属氧化物传感器阵列 (CMOSA) 应用的绝佳候选者。