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Study of a Formaldehyde Gas Sensor Based on a Sputtered Vanadium Pentoxide Thin Film Decorated with Gold Nanoparticles
ECS Journal of Solid State Science and Technology ( IF 1.8 ) Pub Date : 2021-08-05 , DOI: 10.1149/2162-8777/ac1691
Jing-Shiuan Niu, I-Ping Liu, Yen-Lin Pan, Jung-Hui Tsai, Wen-Chau Liu

Formaldehyde (HCHO) gas sensing properties of a new sensor based on a sputtered vanadium pentoxide (V2O5) thin film decorated with evaporated gold (Au) nanoparticles (NPs) are studied and reported herein. The use of Au NPs effectively increases the surface area/volume (SA/V) ratio and enhances the catalytic activity of Au metal. Experimentally, good p-type sensing characteristics, including a high sensing response ratio of 73.1% under 20 ppm HCHO/air gas and a small recovery time of 6.8 s at 225 C, are obtained. An extremely low detecting level of 15 ppb HCHO/air is also acquired. Due to these advantages and the benefits of simple structure and easy fabrication, the studied Au NP/V2O5 device is an excellent candidate for p-type consumption formaldehyde gas sensing and complementary metal oxide sensor array (CMOSA) applications.



中文翻译:

基于金纳米粒子装饰的溅射五氧化二钒薄膜的甲醛气体传感器的研究

本文研究并报告了基于溅射的五氧化二钒 (V 2 O 5 ) 薄膜的新型传感器的甲醛 (HCHO) 气敏特性,该薄膜装饰有蒸发的金 (Au) 纳米颗粒 (NP)。使用金纳米粒子有效地增加了表面积/体积(S/ V)的比例,并提高Au金属的催化活性。实验上,获得了良好的 p 型传感特性,包括在 20 ppm HCHO/空气气体下的 73.1% 的高传感响应比和 225°C 下 6.8 秒的小恢复时间。还获得了 15 ppb HCHO/空气的极低检测水平。由于这些优点以及结构简单、易于制造的优点,所研究的 Au NP/V 2 O 5 该器件是 p 型消耗甲醛气体传感和互补金属氧化物传感器阵列 (CMOSA) 应用的绝佳候选者。

更新日期:2021-08-05
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