Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.

微/纳米结构部件在微光学和光学工程、摩擦学和表面工程、生物和生物医学工程等领域发挥着重要作用。精密玻璃成型技术是制造微/纳米结构玻璃组件的最有效方法，其前提是与微/纳米结构互补的融合制造。已经开发了许多模具制造方法来制造极小和高质量的微/纳米结构，以满足各种应用对功能性微/纳米结构玻璃组件的需求。此外，还应仔细考虑模具的使用性能。本文回顾了用于制造微/纳米结构模具的各种技术。作者首先介绍了模具材料的极端要求。以下部分详细介绍了现有的微/纳米结构模具制造技术及其相应的模具材料，包括非机械和机械方法。本文最后详细讨论了作者最近对镍磷 (Ni-P) 模具制造及其使用性能的研究。