In order to decrease the backward motion and improve the motion efficiency, a walking type piezoelectric actuator has been proposed with two ‘legs’ based on the parasitic motion of obliquely assembled PZT stacks. The structure and motion principle of the proposed walking type piezoelectric actuator are described, and its experiment system is set up. Experimental results indicate the proposed piezoelectric actuator could reduce the backward motion effectively. The minimum backward rate α= 2.26% is achieved under the condition of the phase difference θ= 180, the input voltage U= 120 V and the input frequency f= 1 Hz; the minimum stepping displacement is 0.24 μm under the condition of U= 5 V, f= 1 Hz and θ= 180; the maximum speed V _max is 2472 μm s⁻¹ under the condition of U =120 V and θ= 180; the maximum vertical load force F _Vmax = 6850 g under the condition of U = 120 V, f = 1 Hz and θ = 180. Furthermore, a dynamic model of the whole walking type piezoelectric actuator is established, and it has been employed to simulate the motion of the proposed walking type piezoelectric actuator. Simulation results present a great agreement of experimental results. This study shows a novel idea for the design of piezoelectric actuators to eliminate the influence of backward motion and improve the output efficiency of the actuator.

为了减少向后运动并提高运动效率，基于倾斜组装的 PZT 堆栈的寄生运动，已经提出了具有两条“腿”的步行型压电致动器。描述了所提出的行走式压电执行器的结构和运动原理，并建立了其实验系统。实验结果表明所提出的压电致动器可以有效地减少向后运动。在相位差θ = 180、输入电压U = 120 V、输入频率f = 1 Hz的条件下实现最小后退率α = 2.26% ；最小步进位移为0.24 μ米的条件下ù= 5 V，f = 1 Hz 且θ = 180；在U = 120 V和θ = 180的条件下，最大速度V _max为2472 μ m s ^-1；在U = 120 V、f = 1 Hz和θ的条件下，最大垂直载荷力F _Vmax = 6850 g = 180。此外，建立了整个步行式压电执行器的动力学模型，并已用于模拟所提出的步行式压电执行器的运动。仿真结果与实验结果非常吻合。本研究为压电执行器的设计提供了一种新颖的思路，以消除向后运动的影响并提高执行器的输出效率。