当前位置: X-MOL 学术Microsyst. Nanoeng. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
MEMS development focusing on collaboration using common facilities: a retrospective view and future directions
Microsystems & Nanoengineering ( IF 7.3 ) Pub Date : 2021-08-12 , DOI: 10.1038/s41378-021-00290-x
Masayoshi Esashi 1, 2
Affiliation  

I have been developing MEMS (microelectromechanical systems) technology and supporting the industry through collaboration. A facility was built in house on a 20 mm square wafer for use in prototyping MEMS and ICs (integrated circuits). The constructed MEMS devices include commercialized integrated capacitive pressure sensors, electrostatically levitated rotational gyroscopes, and two-axis optical scanners. Heterogeneous integration, which is a MEMS on an LSI (large-scale integration), was developed for sophisticated systems using LSI made in a foundry. This technology was applied for tactile sensor networks for safe robots, multi FBAR filters on LSI, active-matrix multielectron emitter arrays, and so on. The facility used to produce MEMS on 4- and 6-inch wafers was developed based on an old semiconductor factory and has been used as an open hands-on access facility by many companies. Future directions of MEMS research are discussed.



中文翻译:

专注于使用通用设施协作的 MEMS 开发:回顾和未来方向

我一直在开发 MEMS(微机电系统)技术并通过合作为行业提供支持。在 20 平方毫米的晶圆上建造了一个工厂,用于 MEMS 和 IC(集成电路)的原型制作。构建的 MEMS 设备包括商业化的集成电容压力传感器、静电悬浮旋转陀螺仪和两轴光学扫描仪。异构集成是 LSI(大规模集成)上的 MEMS,是为使用代工厂制造的 LSI 的复杂系统开发的。该技术应用于安全机器人的触觉传感器网络、LSI 上的多 FBAR 滤波器、有源矩阵多电子发射器阵列等。用于在 4 英寸和 6 英寸晶圆上生产 MEMS 的设施是基于旧的半导体工厂开发的,并已被许多公司用作开放式动手访问设施。讨论了 MEMS 研究的未来方向。

更新日期:2021-08-12
down
wechat
bug