Scavenging mechanical energy from ubiquitous vibrations through miniaturized electromagnetic (EM) transducers is a potential solution to the problem of powering wireless sensor networks for the Internet of Things (IoT). This letter presents the design and performance analysis of fully integrated EM vibration energy harvesters on the scale of microelectromechanical systems (MEMS). Through analytical formulation and finite element analysis, we present a systematic design study to optimize the magnet-coil interaction in a precise location within a small surface area (“footprint”). The compact device topology yielded an EM coupling as high as 62.9 mWb/m with optimized stripe-shaped micromagnets and rectangular microcoils. The nonlinear spring topology demonstrated six times improvement in the half-power bandwidth compared to its linear counterpart, at a cost of reduced power density. The designs can be implemented using standard MEMS fabrication methods leveraging CMOS-compatible integration at the system level for potential applications in the IoT.

中文翻译：

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使用微磁体阵列优化模式改进 MEMS 电磁振动能量收集器的性能


通过小型化电磁 (EM) 传感器从无处不在的振动中获取机械能，是解决物联网 (IoT) 无线传感器网络供电问题的潜在解决方案。这封信介绍了微机电系统 (MEMS) 规模的完全集成电磁振动能量收集器的设计和性能分析。通过解析公式和有限元分析，我们提出了一项系统设计研究，以优化小表面积（“足迹”）内精确位置的磁体-线圈相互作用。紧凑的器件拓扑通过优化的条形微磁体和矩形微线圈产生高达 62.9 mWb/m 的电磁耦合。与线性弹簧拓扑相比，非线性弹簧拓扑的半功率带宽提高了六倍，但代价是功率密度降低。这些设计可以使用标准 MEMS 制造方法来实现，利用系统级的 CMOS 兼容集成，以实现物联网中的潜在应用。