Abstract

In this work, the influence of the material of the contact sublayer and the growth temperature on the geometric dimensions and the value of the piezoelectric response of carbon nanotubes for their use in nanopiezotronic devices is investigated. The thermodynamic laws that characterize the processes occurring in the "catalyst/sublayer/substrate" system have been established. It was found that with an increase in temperature, the carbon nanotubes density decreases from 1.1 to 0.001 µm⁻² for Mo, and from 26 to 0.1 µm⁻² for Cr. The value of the piezoelectric response was estimated, which ranged from 8 to 14 nA for the Cr sublayer and from 3 to 23 nA for the Mo sublayer. It is shown that the obtained structures are promising for the creation of nanopiezotronic elements (nanogenerators, energy nanoharvesters).

摘要

在这项工作中，研究了接触子层材料和生长温度对碳纳米管在纳米压电器件中的几何尺寸和压电响应值的影响。已经建立了表征“催化剂/亚层/基材”系统中发生的过程的热力学定律。发现随着温度的升高，碳纳米管的密度从 Mo 的 1.1 降低到 0.001 µm ^-2，从 26 降低到 0.1 µm ^-2对于铬。估计压电响应的值，Cr 亚层的范围为 8 到 14 nA，Mo 亚层的范围为 3 到 23 nA。结果表明，所获得的结构有望用于制造纳米压电元件（纳米发电机、能量纳米收集器）。