In the mono-crystalline silicon passivated emitter and rear cell (PERC), the back side passivation film made up of Al₂O₃ + SiN_x:H stacks is the mainstream design. In this paper, the effect of the thickness of Al₂O₃ passivation layer on the performance of the solar cell was studied, and the correlation between the refractive index (RI) of SiN_x:H layer and the efficiency gain of the solar cell after regeneration was analyzed. The results indicate that the thickness of Al₂O₃ layer needs to be balanced between the surface passivation and bulk passivation of SiN_x:H, and the lower RI of SiN_x:H layer shows a better hydrogen passivation capability. During the restoration of the solar cell efficiency, a thinner Al₂O₃ layer facilitates a faster stabilization of the boron-oxygen complexes. Finally, a new five-layer SiN_x:H film was designed for the back side passivation film, and a conversion efficiency of 22.56 % was achieved, which is 0.05 % higher than that of the solar cell with a single-layer SiN_x:H film.

在单晶硅钝化发射极和背面电池（PERC）中，由Al ₂ O ₃  + SiN _x :H 堆叠构成的背面钝化膜是主流设计。本文研究了Al ₂ O ₃钝化层厚度对太阳能电池性能的影响，以及SiN _x :H层的折射率(RI)与太阳能电池效率增益的相关性。再生后进行分析。结果表明，A1的厚度₂ ö ₃层需要的SiN的表面钝化和体钝化之间进行平衡_X：H，和SiN构成下部RI _X:H 层显示出更好的氢钝化能力。在太阳能电池效率的恢复过程中，较薄的 Al ₂ O ₃层有利于硼氧复合物的更快稳定。最后，为背面钝化膜设计了新的五层 SiN _x :H 膜，实现了 22.56 % 的转换效率，比具有单层 SiN _x的太阳能电池高 0.05 % ： H片。