We propose a method for designing the multilayer diffractive optical elements (MLDOEs) to improve the polychromatic integral diffraction efficiency (PIDE) in wide angle of incidence. By comparing and analyzing the characteristic angle weighted PIDE (CAW-PIDE) in the whole angles of incidence, the optimal microstructure height combination of the MLDOE can be obtained. The optimization process and simulation examples for the single-band and multi-band MLDOE are given. Compared to the conventional method, the PIDE is obviously improved in wide angle of incidence by our method. This optimization method can be applied to different working wavebands, and the image quality of the hybrid optical system with the MLDOE can be improved in wide angle of incidence.

我们提出了一种设计多层衍射光学元件 (MLDOE) 的方法，以提高宽入射角下的多色积分衍射效率 (PIDE)。通过对全入射角的特征角加权PIDE（CAW-PIDE）进行比较分析，可以得到MLDOE的最佳微结构高度组合。给出了单波段和多波段MLDOE的优化过程和仿真实例。与传统方法相比，我们的方法在宽入射角方面明显改善了PIDE。这种优化方法可以适用于不同的工作波段，并且可以在大入射角下提高MLDOE混合光学系统的成像质量。