A set of gas nitriding coating device suitable for the electrostatic deflector (ESD) of cyclotron is designed. Using this device, the TiN coating on small electrode of titanium alloy coupons was carried out in the mixture of nitrogen and ammonia. The effects of nitriding temperature and time on the reaction results were studied, the results of the coating experiment were analyzed, and the surface treatment parameters suitable for gas nitriding TiN coating on the surface of the titanium alloy electrode of the ESD were obtained. X-Ray Diffraction (XRD), scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize and analyze the properties of nitrided coatings. And a high voltage discharge experiment was performed on the sample to measure its dark current. The results show that under atmospheric pressure, annealing temperature of 900 °C, and holding time of 8 h, the coating conditions of titanium alloy electrode materials has the best performance.

中文翻译：

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SC200超导质子回旋加速器的ESD表面处理


设计了一套适用于回旋加速器静电偏转器（ESD）的气体氮化涂层装置。利用该装置，在氮气和氨的混合气体中对钛合金试块小电极进行了TiN涂层。研究了氮化温度和时间对反应结果的影响，并对涂层实验结果进行了分析，得到了适合ESD钛合金电极表面气体氮化TiN涂层的表面处理参数。采用X射线衍射（XRD）、扫描电子显微镜（SEM）和X射线光电子能谱（XPS）对氮化涂层的性能进行表征和分析。并对样品进行高压放电实验，测量其暗电流。结果表明，在常压、退火温度900℃、保温时间8h的条件下，钛合金电极材料的涂层性能最佳。