A double-layer silicon-based stripline filter with a center frequency of 20.76 GHz and a bandwidth of 2 GHz was designed by using an aggressive space mapping (ASM) and fabricated with microelectromechanical systems (MEMS) technology. The measurements agreed well with simulation, showing efficiency and accuracy of the ASM algorithm. Over temperature range of −50 to 80°C, the filter's performance such as insertion loss, bandwidth and central frequency were investigated and discussed, and the measured frequency drift is −55.5 ppm/°C and the bandwidth variation is ±4% over temperature range of −50 to 80°C. At 150°C after 1000 h of aging test, although the insertion loss of the filter slightly increased from 2.18 to 2.4 dB and the passband ripple deteriorated, the stopband rejection performance improved.

中文翻译：

---

MEMS硅基六阶带状线滤波器温度稳定性研究

中心频率为 20.76 GHz、带宽为 2 GHz 的双层硅基带状线滤波器是通过使用积极的空间映射 (ASM) 设计的，并采用微机电系统 (MEMS) 技术制造。测量结果与仿真结果一致，显示了 ASM 算法的效率和准确性。在−50 至 80°C 的温度范围内，研究和讨论了滤波器的插入损耗、带宽和中心频率等性能，测得的频率漂移为 -55.5 ppm/°C，带宽随温度变化为 ±4% -50 至 80°C 的范围。在150°C下，经过1000 h老化测试，虽然滤波器的插入损耗从2.18分贝略微增加到2.4分贝，通带纹波变差，但阻带抑制性能有所提高。