The compliant mechanism based precision motion stage has emerged as one of the key enabling components in many advanced engineering applications. It is particularly challenging to design high precision spatial motion stages with a compact size and large motion stroke. In this research, we propose an additive-manufacturing-friendly spatial flexure mechanism based tilt precision motion stage with compact structure, which is composed of bionic structures of an S-Layer and a J-Layer connected in parallel. Thanks to the asymmetric stiffness configuration of the S-Layer and J-Layer, the end-effector of the tilt stage can deflect around X-axis, which is significantly simpler than conventional tip-tile stage designs in the literature. A theoretical model is also established based on Castigliano’s second theorem to analyze the mechanical performance and predict the angular output. Comprehensive FEA (Finite Element Analysis) simulations and experimental verifications are provided to evaluate the proposed design, where comparative studies are also given to demonstrate the advantages of the proposed method.

基于柔顺机构的精密运动平台已成为许多先进工程应用中的关键支持组件之一。设计具有紧凑尺寸和大运动行程的高精度空间运动平台尤其具有挑战性。在这项研究中，我们提出了一种结构紧凑的基于增材制造友好空间弯曲机构的倾斜精密运动平台，它由平行连接的 S 层和 J 层的仿生结构组成。由于 S 层和 J 层的非对称刚度配置，倾斜平台的末端执行器可以围绕 X 轴偏转，这比文献中的传统尖端瓦平台设计要简单得多。还基于Castigliano第二定理建立了理论模型来分析机械性能并预测角输出。提供全面的 FEA（有限元分析）模拟和实验验证来评估所提出的设计，其中还提供了比较研究以证明所提出方法的优点。