In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.

中文翻译：

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多频电容耦合等离子体中的自偏置电压形成和带电粒子动力学

在这项工作中，我们分析了由多频波形驱动的电容耦合射频等离子体中放电不对称性的产生和直流自偏置电压的伴随形成，作为电极表面特性的函数。对于后者，我们考虑并改变表征电子从表面的弹性反射和离子诱导的二次电子产率的系数。我们的研究基于等离子体的粒子细胞内/蒙特卡罗碰撞模拟以及有助于理解计算结果的模型。发现在多频激励存在下，电极的电子反射会轻微影响放电不对称性，