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Highly sensitive and flexible pressure sensors using position- and dimension-controlled ZnO nanotube arrays grown on graphene films
NPG Asia Materials ( IF 8.6 ) Pub Date : 2021-07-30 , DOI: 10.1038/s41427-021-00324-w
Jun Beom Park 1 , Minho S. Song 1 , Ramesh Ghosh 1 , Rajendra Kumar Saroj 1 , Yunjae Hwang 1 , Gyu-Chul Yi 1, 2 , Youngbin Tchoe 3 , Hongseok Oh 3 , Hyeonjun Baek 4 , Yoonseo Lim 5 , Bosung Kim 6 , Sang-Woo Kim 6
Affiliation  

A facile and novel technique for the fabrication of pressure sensors is reported based on the hybridization of one-dimensional nanomaterials and two-dimensional graphene film. In particular, piezoelectric pressure sensors are fabricated by using vertically aligned and position- and dimension-controlled ZnO nanotube arrays grown on graphene layers. Graphene layers act not only as substrates for catalyst-free growth of high-quality ZnO nanotubes but also as flexible conduction channels connecting ZnO nanotubes and metal electrodes. Freestanding and flexible sensors have been efficiently obtained via mechanical lift-off of hybrid ZnO nanotube/graphene film structures and by exploiting the weak van der Waals forces existing between the graphene film and the original substrates. A prototype of such devices shows a high pressure sensitivity (−4.4 kPa−1), which would enable the detection of weak flows of inert gas. The relatively low wall thickness and large length of the ZnO nanotubes suggest a relatively high sensitivity to external pressures. The obtained nanotube sensors are attached to the philtrum and wrist of a volunteer and used to monitor his breath and heart rate. Overall, the prototype hybrid sensing device has great potential as wearable technology, especially in the sector of advanced healthcare devices.



中文翻译:

使用在石墨烯薄膜上生长的位置和尺寸控制的 ZnO 纳米管阵列的高度灵敏和灵活的压力传感器

报道了一种基于一维纳米材料和二维石墨烯薄膜的混合制造压力传感器的简便而新颖的技术。特别是,压电压力传感器是通过使用在石墨烯层上生长的垂直对齐和位置和尺寸控制的 ZnO 纳米管阵列制造的。石墨烯层不仅可以作为高质量 ZnO 纳米管无催化剂生长的基底,还可以作为连接 ZnO 纳米管和金属电极的柔性导电通道。通过混合ZnO纳米管/石墨烯薄膜结构的机械剥离以及利用石墨烯薄膜和原始基板之间存在的弱范德华力,已经有效地获得了独立且灵活的传感器。此类设备的原型显示出高压力灵敏度 (-4.4 kPa-1 ),这将能够检测惰性气体的微弱流动。ZnO 纳米管的相对较低的壁厚和较大的长度表明对外部压力的敏感性较高。获得的纳米管传感器连接到志愿者的人中和手腕上,用于监测他的呼吸和心率。总体而言,原型混合传感设备作为可穿戴技术具有巨大潜力,尤其是在高级医疗保健设备领域。

更新日期:2021-07-30
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