Terbium scandium aluminum garnet crystal is a promising material which has excellent characteristics for magneto-optical devices. We report on the fabrication of optical planar and ridge waveguides in the terbium scandium aluminum garnet by using combination of helium ion implantation and precise diamond blade dicing. The conditions for the ion implantation are an energy of 400 keV and a fluence of 6 × 10¹⁶ ions/cm². The rotating velocity and cutting speed of the diamond blade were set to be 20,000 rpm and 0.1 mm/s, respectively. The implantation depth and distributions of energy loss were calculated by the stopping and range of ions in matter 2013. The refractive index distribution and the dark-mode spectrum for the implanted planar waveguide were obtained by the reflectivity calculation method and the prism coupling system, respectively. The near-field intensity profiles of both the planar and ridge waveguides were measured by the end-face coupling technique. The optical guiding properties of the terbium scandium aluminum garnet waveguides suggest that they can serve as candidates for optical waveguide isolators.

铽钪铝石榴石晶体是一种很有前途的材料，具有优异的磁光器件特性。我们报告了通过使用氦离子注入和精确金刚石刀片切割的组合在铽钪铝石榴石中制造光学平面和脊形波导。离子注入的条件是能量为 400 keV，能量密度为 6 × 10 ¹⁶ ions/cm ². 金刚石刀片的转速和切割速度分别设置为 20,000 rpm 和 0.1 mm/s。注入深度和能量损失分布通过物质2013中离子的阻滞和射程计算。注入平面波导的折射率分布和暗模式光谱分别通过反射率计算方法和棱镜耦合系统获得. 通过端面耦合技术测量平面波导和脊形波导的近场强度分布。铽钪铝石榴石波导的光导特性表明它们可以作为光波导隔离器的候选材料。