The high sensitivity flexible capacitive pressure sensor (FCPS) manufactured in a fast and efficient way has friendly man-machine interaction function. In this paper, a high-sensitivity FCPS is developed by using a two-step template method to reproduce biomimetic microtower polydimethylsiloxane (PDMS) from the lotus leaf surface. The capacitive sensor is composed of a PDMS dielectric layer and the Cu nanowire electrodes sandwiching in the middle, with a high sensitivity of ~1.207 kPa⁻¹, a low detection limit of less than 0.02 kPa and a fast response time of 61.6 ms. Particularly, the sensing performance can be kept basically unchanged when bent at a 5 mm radius. Moreover, the FCPS can withstand 4000 repeated tests and maintain stable performance, and the sensitivity is almost the same in the process of loading and unloading, suggesting the high robustness. These results demonstrates the FCPSs have potential applications in electronic wearables, human health monitoring and uneven surface applications.

快速高效制造的高灵敏度柔性电容式压力传感器（FCPS）具有友好的人机交互功能。在本文中，通过使用两步模板法从荷叶表面复制仿生微型塔式聚二甲基硅氧烷 (PDMS)，开发了一种高灵敏度 FCPS。电容式传感器由 PDMS 介电层和夹在中间的 Cu 纳米线电极组成，具有 ~1.207 kPa ^-1的高灵敏度，低于 0.02 kPa 的低检测限和 61.6 ms 的快速响应时间。特别是弯曲半径为5mm时，传感性能基本保持不变。而且FCPS可以承受4000次重复测试并保持性能稳定，加载和卸载过程中的灵敏度几乎相同，表明具有很高的鲁棒性。这些结果表明 FCPS 在电子可穿戴设备、人体健康监测和不平整表面应用中具有潜在应用。