As the most important component for MEMS-based pyrotechnics, the micrometer should generate enough energy to successfully ignite the next explosive. An enhanced reactive igniter was designed and fabricated through sputtering the Al/CuO nanolaminates onto the NiCr micro-heater to enhance the output energy of the NiCr micro-heater. The average thickness of the Al/CuO nanolaminate is 6.84 μm, and the designed thickness is 6 μm. The grain sizes of Al/CuO nanolaminates are not uniform, and the particle grains of the Al/CuO nanolaminates at the top are smaller than those at the bottom. When the applied currents passed through the igniter, the resistance of the igniter changed dynamically, leading to the igniter experiencing three stages. Compared to the bare NiCr micro-heater without depositing Al/CuO nanolaminates, the enhanced reactive igniter can successfully ignite Zr/KClO₄ explosive, indicating that the Al/CuO nanolaminates could enhance the output capability of the NiCr micro-heater. It is of vital importance to guide the design of MEMS-based pyrotechnics.

中文翻译：

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通过将 Al/CuO 纳米层压板沉积到 NiCr 微加热器上的增强型反应点火器的设计、制造和性能

作为基于 MEMS 的烟火技术中最重要的组件，千分尺应该产生足够的能量来成功点燃下一个爆炸物。通过将Al/CuO纳米层压材料溅射到NiCr微加热器上，设计并制造了一种增强型反应点火器，以提高NiCr微加热器的输出能量。Al/CuO 纳米层压板的平均厚度为 6.84 μm，设计厚度为6 μ米。Al/CuO纳米层压板的晶粒尺寸不均匀，顶部的Al/CuO纳米层压板的颗粒晶粒小于底部的。当施加的电流通过点火器时，点火器的电阻动态变化，导致点火器经历三个阶段。与未沉积Al/CuO纳米层压板的裸NiCr微型加热器相比，增强型反应点火器可以成功点燃Zr/KClO ₄炸药，表明Al/CuO纳米层压板可以提高NiCr微型加热器的输出能力。指导基于 MEMS 的烟火技术的设计至关重要。