The coatings ZrB₂ and Zr-B-N were deposited by magnetron sputtering of ZrB₂ target in Ar and Ar–15%N₂ atmospheres. The structure and properties of the coatings were investigated via scanning and transmission electron microscopy, energy dispersion analysis, optical profilometry, glowing discharge optical emission spectroscopy and X-ray diffraction analysis. Mechanical and tribological properties of the coatings were investigated using nanoindentation, “pin-on-disc” tribological testing and “ball-on-plate” impact testing. Free corrosion potential and corrosion current density were measured by electrochemical testing in 1N H₂SO₄ and 3.5%NaCl solutions. The oxidation resistance of the coatings was investigated in the 600–800 °С temperature interval. The coatings deposited in Ar contained 4–11 nm grains of the h-ZrB₂ phase along with free boron. Nitrogen-containing coatings consisted of finer crystals (1–4 nm) of h-ZrB₂, separated by interlayers of amorphous a-BN. Both types of coatings featured hardness of 22–23 GPa; however, the introduction of nitrogen decreased the coating’s elastic modulus from 342 to 266 GPa and increased the elastic recovery from 62 to 72%, which enhanced the wear resistance of the coatings. N-doped coatings demonstrated a relatively low friction coefficient of 0.4 and a specific wear rate of ~1.3 × 10⁻⁶ mm³N⁻¹m⁻¹. Electrochemical investigations revealed that the introduction of nitrogen into the coatings resulted in the decrease of corrosion current density in 3.5% NaCl and 1N H₂SO₄ solution up to 3.5 and 5 times, correspondingly. The superior corrosion resistance of Zr-В-N coatings was related to the finer grains size and increased volume of the BN phase. The samples ZrB₂ and Zr-B-N resisted oxidation at 600 °C. N-free coatings resisted oxidation (up to 800 °С) and the diffusion of metallic elements from the substrate better. In contrast, Zr-B-N coatings experienced total oxidation and formed loose oxide layers, which could be easily removed from the substrate.

中文翻译：

---

ZrB2 和 Zr-BN 涂层的结构、耐腐蚀性、机械和摩擦学性能

ZrB ₂和Zr-BN涂层是通过磁控溅射ZrB ₂靶材在Ar 和Ar–15%N ₂气氛中沉积的。通过扫描和透射电子显微镜、能量色散分析、光学轮廓仪、辉光放电发射光谱和X射线衍射分析研究了涂层的结构和性能。使用纳米压痕、“销盘式”摩擦学测试和“球盘式”冲击测试来研究涂层的机械和摩擦学性能。通过电化学测试在 1N H ₂ SO ₄中测量自由腐蚀电位和腐蚀电流密度和 3.5%NaCl 溶液。在 600–800 °С 温度区间内研究了涂层的抗氧化性。沉积在 Ar 中的涂层包含 4-11 nm 的 h-ZrB ₂相晶粒以及游离硼。含氮涂层由更细的 h-ZrB ₂晶体（1-4 nm）组成，由非晶 a-BN 夹层隔开。两种类型的涂层硬度都为 22-23 GPa；然而，氮的引入使涂层的弹性模量从 342 GPa 降低到 266 GPa，弹性回复率从 62% 增加到 72%，从而提高了涂层的耐磨性。N 掺杂涂层表现出相对较低的 0.4 摩擦系数和~1.3 × 10 ^-6 mm ³ N ^-1的特定磨损率米^-1。电化学研究表明，在涂层中引入氮导致在 3.5% NaCl 和 1N H ₂ SO ₄溶液中的腐蚀电流密度分别下降3.5 和 5 倍。Zr-B-N 涂层的优异耐腐蚀性与更细的晶粒尺寸和 BN 相的体积增加有关。样品 ZrB ₂和 Zr-BN 在 600 °C 下抗氧化。无氮涂层能更好地抵抗氧化（高达 800 °С）和金属元素从基材的扩散。相比之下，Zr-BN 涂层经历了完全氧化并形成了松散的氧化层，可以很容易地从基材上去除。