We present a single-shot spectrally-resolved interferometry for simultaneously measuring the film thickness and surface profile of each layer of a patterned multilayer film structure. For this purpose, we implemented an achromatic phase shifting method based on the geometric phase using the polarization characteristics of the light and obtained four phase-shifted interferograms in the spectrally-resolved fringe pattern at the same time by combining a pixelated polarizing camera with an imaging spectrometer. As a result, we could simultaneously measure the reflectance and phase of the sample over a wide wavelength range with a single measurement. To evaluate the validity of the proposed method, we measured a patterned five-layer film specimen and compared our measurement results with those from commercial instruments, an ellipsometer and a stylus profiler, respectively. We confirmed the results matched each other well.

中文翻译：

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用于同时测量多层薄膜的厚度和表面轮廓的单次光谱分辨干涉测量法

我们提出了一种单次光谱分辨干涉测量法，用于同时测量图案化多层膜结构的每一层的膜厚和表面轮廓。为此，我们利用光的偏振特性实现了一种基于几何相位的消色差相移方法，并通过将像素化偏振相机与成像相结合，在光谱分辨条纹图案中同时获得了四个相移干涉图。光谱仪。因此，我们可以通过一次测量同时测量样品在宽波长范围内的反射率和相位。为了评估所提出方法的有效性，我们测量了一个带图案的五层薄膜样品，并将我们的测量结果与商业仪器的测量结果进行了比较，分别是椭偏仪和测针仪。我们确认结果相互匹配。