Spatial light modulators (SLMs) are important for various applications in photonics, such as near-infrared imaging, beam steering and optical communication. After decades of advances, current commercial devices are typically limited to kilohertz modulating speeds. To realize higher operating speeds, an electro-optic (EO) polymer and silicon nitride hybrid SLM has been demonstrated in this work. We utilize a specially designed metasurface to support a relatively high quality resonance and simultaneously confine most of the incident light in the active EO polymer layer. Combing with the high EO coefficient of the polymer, a clear modulation at 10 MHz with a driving voltage of Vp-p=±10 V has been observed in the proof-of-concept device. Our first-generation device leaves vast room for further improvement and may open an attractive route towards compact SLM with an RF modulation higher than 100 GHz.

中文翻译：

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基于超表面的电光聚合物和氮化硅混合空间光调制器

空间光调制器 (SLM) 对光子学中的各种应用很重要，例如近红外成像、光束控制和光通信。经过几十年的进步，当前的商业设备通常仅限于千赫兹调制速度。为了实现更高的运行速度，这项工作已经证明了电光 (EO) 聚合物和氮化硅混合 SLM。我们利用专门设计的超表面来支持相对高质量的共振，同时将大部分入射光限制在活性 EO 聚合物层中。结合聚合物的高 EO 系数，在 10 MHz 下进行清晰的调制，驱动电压为 V p-p在概念验证设备中观察到 =±10 V。我们的第一代设备为进一步改进留下了广阔的空间，并可能为实现射频调制高于 100 GHz 的紧凑型 SLM 开辟一条有吸引力的途径。